发明名称 METHOD FOR FORMING ELECTRONIC PART AND SOLDER BUMP
摘要 PROBLEM TO BE SOLVED: To provide a method for forming an electronic part that has solder bumps with favorable bonding strength on an electrode and solder bumps with favorable bonding strength. SOLUTION: Electrodes 2 to be in conduction with a gold bump 7 of an electronic part 6 with bumps and electrodes 3 to form solder bumps 5 are formed on a substrate 1. Nickel and gold films are successively formed on the electrodes 2 and 3. Before forming solder bumps 5, the thickness of the gold film formed on the electrodes 3 is set within a range where the upper limit is set so that the weight % of gold melted in the solder bumps 5 is 0.1% or less and the lower limit is 0.01μm. Consequently, the amount of gold melted into the solder is limited, and solder bumps 5 with favorable bonding strength can be formed because production of a fragile compound of gold and tin is restricted in the solder bumps 5.
申请公布号 JPH11214419(A) 申请公布日期 1999.08.06
申请号 JP19980013725 申请日期 1998.01.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAJI HIROSHI
分类号 H01L21/60;H01L23/12;H05K3/24;H05K3/34;(IPC1-7):H01L21/60 主分类号 H01L21/60
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