SELF-DETECTION-TYPE SPM PROBE AND SPM DEVICE

摘要

PROBLEM TO BE SOLVED: To appropriately detect the amount of deflection of a cantilever by excluding the influence of a carrier being generated since a leak current and light between piezo resistors is applied. SOLUTION: Impurity diffusion layers 18 and 20 consisting of a conductive type (p-type silicon substrate) and an opposite conductive type (n-well region) of a semiconductor substrate 14 are formed on a surface where piezo-resistors 22 and 24 and the semiconductor substrate 16 touch, thus performing element separation by insulation, thus excluding the influence of a carrier being generated since a leak current and light between the piezo-resistors 22 and 24 each other or between the piezo-resistors 22 and 24 are applied.