发明名称 CRACK INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To obtain a crack inspection method in which a crack generated in the semiconductor layer of a photovoltaic element as a constituent member for a solar cell module is detected precisely and by a simple operation. SOLUTION: A dissolving liquid does not dissolve an upper layer 105 in which a crack 101 is generated, and it dissolves a lower layer 104. It is dropped on the crack 101, the circumference of the crack 101 in the lower layer 104 is dissolved, a cavity part 106 is formed, and the upper layer 105 on the cavity part 106 is made hollow. Thereby, a black belt 102 is formed in the circumference of the crack 101 on the surface of the upper layer 105, and the crack 101 which is fine is revealed so as to be observed.
申请公布号 JPH11211675(A) 申请公布日期 1999.08.06
申请号 JP19980017609 申请日期 1998.01.30
申请人 CANON INC 发明人 TAKADA KENJI;MORI MASAHIRO;SHIOZUKA AYAKO;MATSUSHITA MASAAKI;TAKABAYASHI MEIJI
分类号 G01N21/91;H01L21/66;H01L31/02;H01L31/04;H05K3/00 主分类号 G01N21/91
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