MANUFACTURE OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device whereby defectives produced at each manufacturing apparatus can be efficiently sorted out. SOLUTION: A sorter 4 is provided on a manufacturing line. If a defective occurs at each manufacturing apparatus, a lot contg. this defective is forcedly carried to the sorter 4, which then classifies the produced defective by models and houses it to thereby eliminates the need for sorting defective products recovered here and hence the throughput can be improved.