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发明名称
SEMICONDUCTOR INTEGRATED DEVICE
摘要
申请公布号
JPH11214520(A)
申请公布日期
1999.08.06
申请号
JP19980010150
申请日期
1998.01.22
申请人
ADVANTEST CORP
发明人
SATO HIROSHI
分类号
H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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