| 摘要 |
<p>PROBLEM TO BE SOLVED: To make adequate electrons emitted with a low applied voltage for enhancing practical usability by constituting a cold cathode element of a diamond-like carbon film, in which the half width value of photoelectric spectrum of C1 S electrons by X-ray photoelectron spectral analysis is within a specified range. SOLUTION: This cold cathode element is formed of a diamond-like carbon film, in which the half width value HW of photoelectric spectrum of C1 S electron by X-ray photoelectric spectral analysis is HW>=1.72 eV. That is, the diamond property or electrical insulating property in the carbon film is weakened, while the graphite property or conductivity is enhanced. Thus, since the emission field of the cold cathode element is reduced, electrons can be emitted adequately even with a low applied voltage. The diamond-like carbon film is formed by ion beam evaporation or the like. According to this method, since the evaporation energy is controllable, the density in the carbon film can be increased, and for this reason preferably a negative ion beam is used.</p> |
