| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device capable of washing a photomask surface by air blow and cleaning the inside of a photomask case as well and is capable of efficiently carrying out the foreign matter inspection of the photomask surface after washing. SOLUTION: This washing device has a photomask washing means which takes out the photomask 1 from the photomask case 2 placed at a prescribed position and removes the foreign matter adhered by a first air blow nozzle 10, a photomask inspection position setting means which sets the photomask 1 washed for the purpose of inspecting the foreign matter on the surface of the photomask 1 washed by the photomask washing means to a prescribed state, a case interior cleaning means which cleans the interior of the photomask case 2 in the state that the photomask is taken out for the purpose of the air blow by a second air blow nozzle 11 and a housing means which houses the photomask 1 subjected to the foreign matter inspection into the photomask case 1 cleaned of the interior. |
