| 申请人 |
CANON K.K., TOKIO/TOKYO, JP;OHMI, TADAHIRO, SENDAI, MIYAGI, JP;APPLIED MATERIALS JAPAN, INC., TOKIO/TOKYO, JP |
发明人 |
YAMAGAMI, ATSUSHI, OHTA-KU, TOKYO, JP;OKAMURA, NOBUYUKI, OHTA-KU, TOKYO, JP;OHMI, TADAHIRO, AOBA-KU, SENDAI-SHI, MIYAGI-KEN, JP;GOTO, HARUHIRO HARRY, AOBA-KU, SENDAI-SHI, MIYAGI-KEN, JP;SHIBATA, TADASHI, SENDAI-SHI, MIYAGI-KEN, JP |
