发明名称 POLISHING APPARATUS WITH IMPROVED ALIGNMENT OF POLISHING PLATES
摘要 In a polishing machine for simultaneous double-sided polishing of workpieces (26) between upper polish plate (210) and lower polish table (20), the upper polish table (16) has a hollow center telescopically receiving in a drive hub (180) supported from below. The drive hub (180) is slotted (12) and the upper polish plate has drive latches (200) received in the slots. Lateral dislocations of the upper polish plate with respect to the drive hub are limited by providing stops (330) on the drive latches which engage the outer surface of the drive hub. Additionally, the upper polish plate is suspended by a lifting rod from a double-ended main lifting cylinder (30).
申请公布号 WO9938649(A1) 申请公布日期 1999.08.05
申请号 WO1999US00840 申请日期 1999.01.14
申请人 SPEEDFAM CORPORATION 发明人 HOSE, JOHN
分类号 B24B37/04;B24B41/047;B24B45/00;(IPC1-7):B24B5/313;B24B7/08;B24B7/17 主分类号 B24B37/04
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