EXCIMER LASER AUTOMATIC FLUORINE CONTROL SYSTEM

摘要

An excimer laser system with a fluorine control having a fixed volume inject bottle (2) in which fluorine is injected prior to it being injected into the laser chamber (1). A manifold (37) and feedback control system (30, 32, 36) is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.