| 摘要 |
A torsion type probe for scanning probe microscopes, especially for atomic force microscopes, is provided. The probe comprises a supporting block, torsion beam means arranged on the supporting block, a thin-film plane plate rotatably supported by the torsion beam means, and a tip formed on the thin-film plane plate. The torsion beam means include a piezoresistor, which is preferably formed in the surface or lateral walls of the torsion beam means, to detect torsion of the torsion beam means as the probe scans the surface of a sample. <IMAGE> <IMAGE> |
