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经营范围
发明名称
Etching apparatus
摘要
申请公布号
GB2323334(B)
申请公布日期
1999.08.04
申请号
GB19980005005
申请日期
1998.03.09
申请人
* LG ELECTRONICS INC
发明人
WOO-SUP * SHIN;GYU-JAE * JEONG
分类号
G02F1/1333;C03C15/00;C23F1/08;(IPC1-7):C03C15/00;G02F1/133
主分类号
G02F1/1333
代理机构
代理人
主权项
地址
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