| 发明名称 |
Optical probe, method of manufacturing an optical probe, and scanning probe microscope |
| 摘要 |
<p>An optical probe 28 in the form of an optical resonator or part thereof. The optical probe 28 has a microscopic aperture so as to increase the intensity of the light within the probe 28 whereby the evanescent light field formed at the microscopic aperture portion is increased. &lt;IMAGE&gt;</p> |
| 申请公布号 |
EP0874216(A3) |
申请公布日期 |
1999.08.04 |
| 申请号 |
EP19980303130 |
申请日期 |
1998.04.23 |
| 申请人 |
SEIKO INSTRUMENTS INC.;AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
FUJIHIRA, MASAMACHI;MURAMATSU, HIROSHI;YAMAMOTO, NORITAKA;HIRAGA, TAKASHI;MORIYA, TETSUO;MITO, AKIHIRO |
| 分类号 |
G01B11/30;G01B9/04;G01N37/00;G01Q60/06;G01Q60/22;G01Q60/32;(IPC1-7):G01B9/04 |
主分类号 |
G01B11/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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