| 摘要 |
<p>PROBLEM TO BE SOLVED: To generate shock waves by a reduced quantity of energy to perform washing work within a short time by using the shock waves in a method for washing the interior of a piping after the execution of the piping of a semiconductor manufacturing apparatus, an air pressure apparatus or the like. SOLUTION: The outlet ports 14 of shock wave generators 2 and 25 are connected to one ends of pipings 1, 9 and 23 and other ends of the pipings 1, 9 and 23 are allowed to communicate with the atmosphere and shock waves generated in the shock wave generators 2 and 25 are passed through the pipings 1, 9 and 23 from one ends thereof toward the other ends thereof to be discharged to the atmosphere from the other ends of the pipings 1, 9 and 23. The dust in the pipings 1, 9 and 23 is discharged out of the pipings 1, 9 and 23 by the passage of shock waves to wash the interiors of the piping 1, 9 and 23 by shock waves.</p> |
