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发明名称
LOW DIELECTRIC POLYMER COMPOUND, ITS INTERMEDIATE AND PREPARATION OF THESE
摘要
申请公布号
JPH11209434(A)
申请公布日期
1999.08.03
申请号
JP19980021450
申请日期
1998.01.19
申请人
SHIN ETSU CHEM CO LTD
发明人
OKAZAKI SATOSHI
分类号
C07F7/08;C07F7/12;C07F7/14;C08F130/08;C08F134/02;H01L23/29;H01L23/31;(IPC1-7):C08F130/08
主分类号
C07F7/08
代理机构
代理人
主权项
地址
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