PHOTOSENSITIVE POLYIMIDE PRECURSOR SOLUTION, POLYIMIDE COATING FILM OR POLYIMIDE FILM OBTAINED THEREFROM, AND PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a solution having a high concentration and low viscosity and giving a coating film excellent in heat resistance by dissolving a solute comprising a salt of a diamine with a compound having a photosensitive group and a sensitizer or a photoinitiator in a solvent. SOLUTION: A salt of an amino-containing compound represented by formula I with a compound represented by formula II and a photoinitiator such as a Michler's ketone are dissolved in a solvent such as N,N-dimethylformamide to obtain a polyimide precursor solution having a concentration of 30 wt.% or above and a viscosity of 100 P or above. A polyimide precursor solution prepared by replacing 0-20 mol.% of the compound of formula II by a carboxylic or dicarboxylic anhydride of formula III or IV is applied to a substrate to form a coating film, the film is irradiated with ultraviolet rays through a negative mask, after the unexposed area is dissolved in a developer, the film is imidized by heating to obtain a polyimide film. In the formula, R is a divalent aromatic residue containing a six-membered carbocylic ring; and R" is H or a 1-5C alkyl; and R"' is hydroxyl or a group composed of an ion having a photosensitive group and O bonded thereto.