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经营范围
发明名称
TRAP DEVICE
摘要
申请公布号
JPH11210621(A)
申请公布日期
1999.08.03
申请号
JP19980025041
申请日期
1998.01.22
申请人
EBARA CORP
发明人
NOMURA NORIHIKO;NOMICHI SHINJI
分类号
F04B37/16;B01D8/00;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):F04B37/16;H01L21/306
主分类号
F04B37/16
代理机构
代理人
主权项
地址
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