Article comprising a capacitor with non-perovskite Sr-Ba-Ti oxide dielectric thin film

摘要

Ba-Sr-Ti-oxide dielectric material, with at least 60 atomic percent of the total content of the oxide being Ti, can have relatively high dielectric constant K (>40 at 20 DEG C.) and relatively low second order voltage coefficient a2 of the dielectric constant (a2 <100 PPM V2 at 20 DEG C.). In preferred embodiments the dielectric material has nominal composition (BAxSryTi1-x-y)-oxide, with 1-x-y in the range 0.65-0.90, with both x and y greater than or equal to 0.05. Ba, Sr and Ti together typically comprise at least 99 atomic percent of the total metal content of the dielectric material.