| 摘要 |
PROBLEM TO BE SOLVED: To make the grinding rate of the center part of a substrate equal to that in a peripheral edge part by pressing the substrate to a grinding pad with equal pressing forces applied to the center part of the substrate and the peripheral edge part. SOLUTION: A substrate holding device 15A for holding a substrate 12 is arranged above a grinding pad 11. The substrate holding device 15A is provided with a rotary shaft 16A, a substrate holding head 17A provided integrally with the rotary shaft 16A, and a guiding member 19A fixed to the substrate holding head 17A. The substrate holding head 17A includes a sealing member 20 provided to be moved up and down, a first space part 21 is formed by the substrate holding head 17A, the sealing member 20 and the substrate 12, and a second space part 22 is formed by the substrate holding head 17A and the sealing member 20. A first fluid supply route 25 is communicated with the first space part 21, and a second fluid supply route 26 is communicated with the second space part 22. |
