| 摘要 |
An interferometric instrument for scanning the surfaces of a test object by measuring the interference maximum contains a radiation generating unit that emits briefly coherent radiation. It is possible to perform precise measurements relatively easily even at difficult-to-access points on the test object by splitting the first beam into at least two additional beams using at least one additional beam splitter. One additional beam, referred to as a reference beam, is supplied to a reference mirror positioned at a specific distance from the additional beam splitter. Another additional beam, referred to as a measuring beam, is deflected to a specific measuring point on the test object. The interference maxima of the reference beam and the measuring beam can be detected separately by the photodetector arrangement and the control system.
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