| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus capable of reducing the probability generating the sudden trouble of a drive part. SOLUTION: The standard operation time of a drive part 72 is set as a reference operation time 'tr ' to be stored in a memory 10. Next, a robot control part 70 measures the actual operation time 'tp ' of the drive part 72 by using a sensor 74 and a soft timer 71. A comparison part 51 calculates the difference td =tr -tp between the reference operation time and the actual operation time. Thereafter, a judge part 52 judges whether the difference 'td ' between the reference operation time and the actual operation time is larger than a preset threshold value 'tth '. When 'td ' is larger than 'tth ', a main control part 50 displays a message to the effect that trouble is announced previously on a display 12. When 'td ' is not more than 'tth ', the measurement of the actual operation time is again continued. |
