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发明名称
WET ETCHING DEVICE AND WET ETCHING METHOD
摘要
申请公布号
JPH11209883(A)
申请公布日期
1999.08.03
申请号
JP19980046142
申请日期
1998.01.22
申请人
CHEMITORONICS CO
发明人
HONMA KOJI
分类号
C23F1/08;H01L21/306;(IPC1-7):C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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