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摘要
申请公布号
JP2929029(B2)
申请公布日期
1999.08.03
申请号
JP19900150697
申请日期
1990.06.08
申请人
SHINKAWA KK
发明人
TAKEUCHI TAKASHI;NAKAGAWA TSUYOSHI
分类号
H01L21/60;B25B5/06;H01L21/00;H01L21/52;(IPC1-7):H01L21/60
主分类号
H01L21/60
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