| 摘要 |
PROBLEM TO BE SOLVED: To increase the degree of flatness and to form a phase thicker in an outer peripheral part than in a center part by controlling the kinds, flow rates and supply positions of grinding fluid and chemical solution. SOLUTION: By using a grinding device for performing grinding by pressing a work 2 to a surface plate 1 rotated while supplying chemical solution from at least two or more nozzles on the surface plate, grinding fluid A is supplied from at least one nozzle, for example, to the center part of the surface plate 1, grinding fluid having a grinding are different from that of the grinding fluid A, alternatively chemical solution having no grinding rates, otherwise chemical solution B for changing the grinding rate of the grinding fluid A is supplied from the other nozzle for example to a part outside a position 3 where the center of the work 2 is an outermost side on the surface plate 1 and inside a position 4 in contact with the outermost periphery of the work 2, and by intentionally generating an area having a different grinding rate, grinding is performed to control the shape of the work. |
