发明名称 |
Method of producing recrystallized-material-member, and apparatus and heating method therefor |
摘要 |
The present invention relates to a method of producing a recrystallized-material-member by melting a given zone of a crystalline-material-member and moving the molten zone continuously along the crystalline-material-member to recrystallize a desired region of the crystalline-material-member, wherein dimension of the molten zone of the crystalline-material-member is controlled to be constant and/or quality of crystal of the recrystallized-material-member is controlled to be uniform.
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申请公布号 |
US5932003(A) |
申请公布日期 |
1999.08.03 |
申请号 |
US19970782918 |
申请日期 |
1997.01.13 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
NAOMOTO, HIDEO;TAKAMI, AKIHIRO;ISHIHARA, TAKASHI;ITO, TAKASHI;CHIBA, TAKATOSHI;TAMAKI, EIICHI |
分类号 |
C30B13/30;C30B13/22;C30B29/02;C30B29/06;H01L21/02;H01L21/20;H01L21/268;H01L27/12;(IPC1-7):C30B15/26 |
主分类号 |
C30B13/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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