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申请公布号
JP2929432(B2)
申请公布日期
1999.08.03
申请号
JP19970036963
申请日期
1997.02.06
申请人
ERU JII SEMIKON CO LTD
发明人
HYON SAN HOAN;ZE KYON AN
分类号
H01L21/336;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/336
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