发明名称 |
Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system |
摘要 |
A puller apparatus for a Czochralski crystal puller system is provided which includes a primary puller chuck and a secondary puller chuck. The primary puller chuck is attached to a seed crystal. The secondary puller chuck is shaped to enclose and retain a portion of a growing crystal so that the growing crystal can be pulled by the secondary puller chuck.
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申请公布号 |
US5932007(A) |
申请公布日期 |
1999.08.03 |
申请号 |
US19970868405 |
申请日期 |
1997.06.03 |
申请人 |
GENERAL SIGNAL TECHNOLOGY CORPORATION |
发明人 |
LI, ZHIXIN |
分类号 |
C30B15/20;C30B15/30;C30B15/32;C30B15/34;H01L21/208;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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