发明名称 Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
摘要 A puller apparatus for a Czochralski crystal puller system is provided which includes a primary puller chuck and a secondary puller chuck. The primary puller chuck is attached to a seed crystal. The secondary puller chuck is shaped to enclose and retain a portion of a growing crystal so that the growing crystal can be pulled by the secondary puller chuck.
申请公布号 US5932007(A) 申请公布日期 1999.08.03
申请号 US19970868405 申请日期 1997.06.03
申请人 GENERAL SIGNAL TECHNOLOGY CORPORATION 发明人 LI, ZHIXIN
分类号 C30B15/20;C30B15/30;C30B15/32;C30B15/34;H01L21/208;(IPC1-7):C30B15/30 主分类号 C30B15/20
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