INTERVAL CONTROLLING PLATE FOR WAFER SCRUBBER FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR19960038481-传众专利搜索

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发明名称	INTERVAL CONTROLLING PLATE FOR WAFER SCRUBBER FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100211660(B1)	申请公布日期	1999.08.02
申请号	KR19960038481	申请日期	1996.09.05
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	KANG, TAE-CHOL;CHO, SOO-WOONG;KIM, YONG-SUK
分类号	H01L21/30;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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