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发明名称
ORIENT PLATE OF WAFER LOADING APPARATUS
摘要
申请公布号
KR100212698(B1)
申请公布日期
1999.08.02
申请号
KR19960038533
申请日期
1996.09.05
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
LEE, CHAE YEONG;SONN, SEONG SU
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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