发明名称 |
ELECTRODE WIRING MATERIAL AND ELECTRODE WIRING BOARD USING IT |
摘要 |
The present invention discloses an electrode wiring material including at least one main element selected from the group consisting of Mo and W and an additional element selected from the group consisting of Kr and Xe in an amount of 0.0003 atomic % to 3 atomic %. The present invention further discloses an electrode wiring substrate including an electrode wiring formed on a glass substrate, wherein the electrode wiring is formed of at least one metal selected from the group consisting of Mo and W and the lattice constant of the electrode wiring material is almost equal to the lattice constant of the electrode wiring material in a bulk state. |
申请公布号 |
KR100213402(B1) |
申请公布日期 |
1999.08.02 |
申请号 |
KR19950033931 |
申请日期 |
1995.09.29 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
IKEDA, MITSUSHI;TSUJI, YOSHIKO;HARA, YUJIRO;ATSUTA, MASAKI;OGAWA, YOSHIFUMI;OKA, TOSHIYUKI;TAKEMURA, MOMOKO |
分类号 |
G02F1/1362;(IPC1-7):H01L21/28 |
主分类号 |
G02F1/1362 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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