发明名称 ELECTRODE WIRING MATERIAL AND ELECTRODE WIRING BOARD USING IT
摘要 The present invention discloses an electrode wiring material including at least one main element selected from the group consisting of Mo and W and an additional element selected from the group consisting of Kr and Xe in an amount of 0.0003 atomic % to 3 atomic %. The present invention further discloses an electrode wiring substrate including an electrode wiring formed on a glass substrate, wherein the electrode wiring is formed of at least one metal selected from the group consisting of Mo and W and the lattice constant of the electrode wiring material is almost equal to the lattice constant of the electrode wiring material in a bulk state.
申请公布号 KR100213402(B1) 申请公布日期 1999.08.02
申请号 KR19950033931 申请日期 1995.09.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 IKEDA, MITSUSHI;TSUJI, YOSHIKO;HARA, YUJIRO;ATSUTA, MASAKI;OGAWA, YOSHIFUMI;OKA, TOSHIYUKI;TAKEMURA, MOMOKO
分类号 G02F1/1362;(IPC1-7):H01L21/28 主分类号 G02F1/1362
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