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发明名称
ETCHING METHOD
摘要
申请公布号
KR100213212(B1)
申请公布日期
1999.08.02
申请号
KR19960037230
申请日期
1996.08.30
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
JUNG, SANG-SUB
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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