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发明名称
CONTROL METHOD OF CHARGED PARTICLE FLUX BY EDGE BIASING OF PLASMA
摘要
申请公布号
KR100212441(B1)
申请公布日期
1999.08.02
申请号
KR19960022465
申请日期
1996.06.20
申请人
KOREA BASIC SCIENCE INSTITUTE
发明人
WHANG, SOON-MO;KIM, BYUNG-CHUL;YOON, NAM-SIK;CHOI, JAE-HOON;YANG, JANG-KYU;LEE, GYUNG-SOO
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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