CELL APERTURE USED IN E-BEAM LITHOGRAPHY,申请号KR19950066059-传众专利搜索

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发明名称	CELL APERTURE USED IN E-BEAM LITHOGRAPHY
摘要
申请公布号	KR100214266(B1)	申请公布日期	1999.08.02
申请号	KR19950066059	申请日期	1995.12.29
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	HEO, CHEOL;JEONG, MYOUNG-JUN
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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