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发明名称
METHOD FOR THE CONTROL OF AN EVAPORATION PROCESS
摘要
申请公布号
KR100213461(B1)
申请公布日期
1999.08.02
申请号
KR19900009500
申请日期
1990.06.26
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
BURUSU, BEEKUMAN;ALBERT, KOLLER
分类号
C23C14/54;H01J37/302;H01J37/305;(IPC1-7):H01J37/305
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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