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发明名称
WAFER LOADING DEVICE IN BAKE CHAMBER
摘要
申请公布号
KR100212715(B1)
申请公布日期
1999.08.02
申请号
KR19960044623
申请日期
1996.10.08
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
BYEON, JU SANG;KIM, HAN SIK
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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