| 摘要 |
PROBLEM TO BE SOLVED: To form a very smooth ground surface on the surface of a vapor phase synthetic diamond thin film. SOLUTION: A surface of a vapor phase synthetic diamond thin film is pressed into contact with a surface plate plane made of a soft artificial or natural organic material, titanium oxide powders having an average particle diameter of 10 to 1000 nm are dispersed and distributed as grinding fluid in aqueous solution at a rate of 2 to 40 wt.%, and by using grinding fluid having viscosity of 1 to 100 cP and pH of 8 to 12.5, the surface plate and/or the thin film are mutually moved on a plane and ground. |
