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发明名称
DOOR OPEN APPARATUS OF WORKING DIE OF CLEAN ROOM
摘要
申请公布号
KR100212131(B1)
申请公布日期
1999.08.02
申请号
KR19960012651
申请日期
1996.04.24
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
JANG, HYUN-KYUNG;LEE, CHA-YOUNG
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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