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发明名称
Verfahren zur interferometrischen Prüfung von technischen Oberflächen
摘要
申请公布号
DE19643074(C2)
申请公布日期
1999.07.29
申请号
DE19961043074
申请日期
1996.10.18
申请人
SCHWIDER, JOHANNES, PROF. DR., 91056 ERLANGEN, DE
发明人
SCHWIDER, JOHANNES, PROF. DR., 91056 ERLANGEN, DE
分类号
G01B9/021;G01M11/08;(IPC1-7):G01B9/02;G01B9/023;G01J3/45;G01B11/24
主分类号
G01B9/021
代理机构
代理人
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地址
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