| 摘要 |
<p>A high efficiency plasma processing system for use in the generation of large quantities of gases, particularly hydrogen peroxide or ozone, for chemical commercial and industrial applications is based upon a homogeneous electrical glow discharge. In addition to the homogenous discharge, the high efficiency of ozone or other chemical production is achieved by exciting the discharge with high voltage pulses which have a voltage rate-of-rise in excess of 500 V/ns and incorporating an internal gas circulation system which maintains the temperature of the process gas to a level where the thermal decomposition of ozone, for example, is significantly reduced. A homogeneous and stable atmospheric glow discharge is developed by preionizing the discharge region with ultra-violet radiation, for example, immediately before the application of the main high voltage pulse across the electrodes of the discharge cell.</p> |
