| 摘要 |
The correction device (1), for a third order aperture error, is provided by a pair of hexapoles (8,9) on either side of a round lens group with 2 round lenses (10,11) of similar focal width and positioned after the objective lens (2) along the lens optical axis, with a single round lens (3) between the objective lens and the correction device.
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| 申请人 |
CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH, 69120 HEIDELBERG, DE |
发明人 |
HAIDER, MAXIMILIAN, DR., 69251 GAIBERG, DE;UHLEMANN, STEPHAN, DR., 69126 HEIDELBERG, DE |
