Micro surface measuring apparatus and probe manufacturing

摘要

For three dimensional measuring in the submillimeter order of inner surfaces of fuel injector nozzles or ink jet nozzles (46). The probe (1)(stepped cantilever with pointed tip) is piezoelectrically (3) oscillated near resonance and adjusted (48) to a distortion amount. Electric (current)(53), magnetic (probe coil) measurements are added. The probe is of cemented carbide (WC,Co), diamond, boron nitride, and is fabricated by a micro electric discharge machining. A detoriated layer is removed by abrasive grain processing.