,申请号JP19970010374-传众专利搜索

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发明名称
摘要
申请公布号	JP2926325(B2)	申请公布日期	1999.07.28
申请号	JP19970010374	申请日期	1997.01.23
申请人	NIKON KK	发明人	NISHI TAKECHIKA
分类号	G03F7/20;G03F7/207;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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