| 发明名称 |
Linear microwave plasma source with permanent magnets |
| 摘要 |
Microwaves are input to an impervious enclosure (10) under vacuum through an elbow section (13) with a sealed window (15) creating gas ionization in a resonant cyclotron zone (35) centimeters inside the elbow. |
| 申请公布号 |
EP0932183(A1) |
申请公布日期 |
1999.07.28 |
| 申请号 |
EP19990400164 |
申请日期 |
1999.01.25 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
DELAUNAY, MARC |
| 分类号 |
H05H1/46;C23C14/34;C23C14/35;H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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