| 摘要 |
A device with a plasma producer with a chamber (27, 27') which is connected with a gas connection and is penetrated by a cathode (19, 19'), and an anode (15, 15') encompassing the cathode (19, 19') with an annular gap, with the annular gap being in connection with the chamber (27, 27') and the anode (15, 15') and the cathode (19, 19') being in connection with the electric connection lines (6). In order to allow a simple exchange of the plasma producer it is provided that the cathode (19, 19') is held in a holding part (18, 18') made of an electrically well-conducting material, and that the holding part (18, 18') and the anode (15, 15') as well as an intermediate part (17, 55) which is arranged between the holding part (18, 18') of the cathode (19, 19') and the anode (15, 15') and which delimits the chamber (27, 27') are jointly connected with at least one connecting part (13, 87) into a module (11, 11') which can be handled as a unit, with the holding part (18, 18') and the anode (15, 15') being in an electrically conducting connection with the contact surfaces which cooperate with the contact pins (9, 9') which are connected with electric connection lines (6) and are held displaceable in an axially resilient manner in a holder (1, 1').
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