| 摘要 |
<p>An inductor structure (100) has a single crystal body (10) with a spiral shaped pedestal (12, 14) formed in one surface and a ground plane conductor (30) disposed over an opposite surface of the body. A spiral shaped conductor (24) is disposed over the spiral shaped pedestal (12, 14). Portions of the conductor (29) are separated from underlying portions of the pedestal by air (31). Laterally adjacent portions of the conductor (24) are separated by air. The single crystal body (10) comprises gallium arsenide. <IMAGE></p> |
