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发明名称
DEVICE FOR FEEDING GAS IN VACUUM
摘要
申请公布号
JPH11200015(A)
申请公布日期
1999.07.27
申请号
JP19980017901
申请日期
1998.01.13
申请人
TDK CORP
发明人
TAKAI MITSURU;UEDA KUNIHIRO
分类号
C23C14/24;G11B5/85;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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