发明名称 WAFER GAP MAINTAINING DEVICE AND METHOD FOR WIRE TYPE CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent wafers from stocking to each other when a work (a material to be cut) is cut. SOLUTION: With regard to a wire type cutting device (a wire saw), a gap retaining body 10 softer than the material of a work 3 is arranged movably in the work 3 feeding direction. The work 3 is cut as it is fed and, when a wafer 3a is formed, the end of the wafer 3a is intruded into the surface of the gap retaining body 10. A gap 4 between the wafers 3a is maintained because a part 10a of the surface of the gap retaining body 10 is intruded into the gap 4 between the wafers 3a. Adjoining wafers 3a are prevented from stocking to each other.
申请公布号 JPH11198017(A) 申请公布日期 1999.07.27
申请号 JP19980017634 申请日期 1998.01.14
申请人 TOKYO SEIKO CO LTD 发明人 MIYOSHI KOUTAROU
分类号 B24B27/06;B28D5/04;(IPC1-7):B24B27/06 主分类号 B24B27/06
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