发明名称 Metal-oxide semiconductor device
摘要 Formed on a grounded semiconductor substrate, via an insulation layer, is a semiconductor layer of the same conductive type as that of the substrate. Formed on the semiconductor layer are source and drain regions of the different conductive type from that of the substrate. The drain region is formed so that its portion reaches the insulation layer. A gate insulation film is formed on the semiconductor layer and a gate electrode is formed on the gate insulation film and between the source and drain regions. A conductive member is embedded in a through hole formed from a portion of the semiconductor layer to the semiconductor substrate via the insulation layer. A source electrode is formed so that the conductive member in the through hole and the source region are connected to each other by means of the source electrode. A drain electrode is connected to the drain region. A common source MOS device is thus formed without a wiring to ground the source by means of the conductive member embedded in the through hole that connects the source electrode to the grounded semiconductor substrate.
申请公布号 US5929488(A) 申请公布日期 1999.07.27
申请号 US19960764274 申请日期 1996.12.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ENDOU, KAZUO
分类号 H01L29/40;H01L29/10;H01L29/78;H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L29/40
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