LASER AND ELECTRIC DISCHARGE COMPOSITE WORKING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To perform working having high accuracy and a smooth finishing surface, by converging electric discharge energy on laser plasma on the surface of a target to guide the energy to a working point, to work the target by the energy. SOLUTION: A pulse laser having high-peak output is applied to a laser device 18. When a pulse laser beam 23 having some fixed or more pulse energy is radiated to a target surface, a target atom is emitted by ablation concurrently generating laser plasma. A high-density electron existing in the laser plasma acts as a trigger for electric discharge to cause electric discharge between an anode 11 and a target 12 by an electric charge condensed in a capacitor 13. At that time, since electric discharge energy is converged to be concentratedly injected into the laser plasma on the surface of the target 12, the target surface in the portion of a laser plasma generating point can be selectively worked.