| 摘要 |
PROBLEM TO BE SOLVED: To inspect and maintain the inside of a stocker from the outside easily by providing an openable/closable inspection window for convering plural storing shelves for storing goods to be stored cleanly, respectively and providing a transfer machine for taking in/out the goods to be stored to/from the storing shelves. SOLUTION: At the inspection and maintenance work time, the inspection window 3 of a transparent acryl is opened and a microswitch 5 is operated and a stocker drive device 6 is turned off and the operation of the transfer machine in the stocker 1 is stopped. By providing the transparent inspection window 3 at every storing shelves of the stocker 1, the visual inspection from the outside of the stocker 1, the inspection at every storing shelves in the stocker 1 and the work efficiency of the maintenance are improved. At the inspection and maintenance work time of the inside of the stocker, the necessary minimum inspection window 3 is opened. The inflow of a powder dust is restrained to minimum and the adhesion of the powder dust to a substrate is reduced. The opening/closing of the window is detected by the microswitch 5 of the inspection window and the transfer machine is stopped and the safety can be improved. |
